Repetitive nonlinear control for linear scanning micro mirrors

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Richard Schroedter - , Fraunhofer-Institut für Elektronische Nanosysteme (Autor:in)
  • Markus Schwarzenberg - , Fraunhofer-Institut für Elektronische Nanosysteme (Autor:in)
  • Jan Grahmann - , Fraunhofer-Institut für Elektronische Nanosysteme (Autor:in)
  • Thilo Sandner - , Fraunhofer-Institut für Elektronische Nanosysteme (Autor:in)
  • Klaus Janschek - , Professur für Automatisierungstechnik (Autor:in)

Abstract

Various scanning applications like LIDAR sensors, OCT systems and laser projectors require a repeated periodic linear scanning trajectory performed by a quasi-static micro mirror. Since most MOEMS systems have inherent nonlinearities like a progressive spring stiffness and the quadratic voltage-deflection-relation of electrostatic drives, a nonlinear control scheme as presented in our previous paper significantly reduces parasitic oscillations of the resonance frequency and enables a high resolution raster scan combining a quasi-static axis with a cardanic mounted resonant axis. In this paper we address a novel control scheme using a flatness-based feedback control enhanced by a plug-in repetitive controller for the linear scanning axis. We demonstrate the applicability of this feedback control for a quasi-static moving micro mirror with electrostatic staggered vertical comb drives using a microcontroller-based driver. On-chip piezoresistive sensors serve as position feedback. We compare different scan trajectories and repetition rates with respect to the linearity and repeatability showing the robustness of the proposed control regime. Furthermore we discuss the advantage of this method to reduce the individual chip characterization for ramping up mass production.

Details

OriginalspracheEnglisch
TitelMOEMS and Miniaturized Systems XVII
Redakteure/-innenYong-Hwa Park, Hans Zappe, Wibool Piyawattanametha
Herausgeber (Verlag)SPIE - The international society for optics and photonics, Bellingham
Seitenumfang8
ISBN (elektronisch)9781510615755
PublikationsstatusVeröffentlicht - 2018
Peer-Review-StatusJa

Publikationsreihe

ReiheProceedings of SPIE - The International Society for Optical Engineering
Band10545
ISSN0277-786X

Konferenz

TitelConference on MOEMS and Miniaturized Systems XVII
Dauer30 - 31 Januar 2018
StadtSan Francisco
LandKanada

Externe IDs

Scopus 85049516362
ORCID /0000-0003-3259-4571/work/142249649

Schlagworte

Schlagwörter

  • electrostatic, micro mirror, nonlinear closed-loop control, piezoresistive sensor, quasi-static, repetitive, staggered vertical comb drive