Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Thilo Sandner - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Grasshoff - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Markus Schwarzenberg - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Richard Schroedter - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Harald Schenk - , Fraunhofer Institute for Photonic Microsystems (Author)

Details

Original languageEnglish
Journal Journal of micro/nanolithography, MEMS and MOEMS
Volume13
Issue number1
Publication statusPublished - 2014
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 84897792314
ORCID /0000-0003-3259-4571/work/142249653

Keywords

Keywords

  • optical MEMS, linearized raster scanning, vertical comb drive, LIDAR, three-dimensional sensing, time-of-flight distance measurement, flat based driving control