Journal of micro/nanopatterning, materials, and metrology : JM3
ISSNs: 2708-8340, 1932-5150, 1537-1646, 1932-5134
Additional searchable ISSN (electronic): 2708-8340
SPIE - The international society for optics and photonics, Bellingham, United States of America
Scopus rating (2022): CiteScore 2.9 SJR 0.298 SNIP 1.036
Journal
| Titles |
|
|---|---|
| Additional searchable titles | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, Journal of microlithography, microfabrication, and microsystems |
| ISSNs | 2708-8340, 1932-5150, 1537-1646, 1932-5134 |
| Additional searchable ISSN (electronic) | 2708-8340 |
| Publisher | SPIE - The international society for optics and photonics, Bellingham |
| Country/Territory | United States of America |
| ZDB-ID | 3056313-6 |