Quasi-static microscanner with linearized scanning for an adaptive 3D-lasercamera

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Thilo Sandner - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Thomas Grasshoff - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Richard Schroedter - , Chair of Opto-Electronic Components and Systems, Fraunhofer Institute for Electronic Nano Systems (Author)
  • Markus Schwarzenberg - , Fraunhofer Institute for Electronic Nano Systems (Author)

Details

Original languageEnglish
Pages (from-to)51-61
Journal Technisches Messen : tm ; Sensoren, Geräte, Systeme
Volume81
Issue number2
Publication statusPublished - 2014
Peer-reviewedYes

External IDs

Scopus 84900674334
ORCID /0000-0003-3259-4571/work/142249657

Keywords

Keywords

  • Optical MEMS, micro scanning mirror, 3D sensing, ToF time-of-flight distance measurement, robotics