Out-of-Plane Mirrors for Single-Mode Polymeric RDL using Direct Laser Writing
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
The growing demand for the Internet of Things (IoT) and Artificial Intelligence (AI) need high-speed communication within short-range distances. In the Back-End-Of-Line (BEOL), Single-Mode Waveguide (SMW) with micro-mirror shows the promising application as an Optical Redistribution Layer (O-RDL) connecting photonic-chip at the interposer-level. The presented study shows the potential application of the 2-Photon-Polymerization (2PP) process for fabrication of out-ofplane coupling elements (micro-mirror) for SMW using low-loss Ormocer hybrid polymers. This fabricated micro-mirror uses as a coupling element to connect the light from RDL to chips or for inter-layer connections at Interposer level. To evaluate the processing time, structural quality, and resolution of the printed micro-mirror, two types of lenses (63x and 25x) and Ormocer® polymers (OrmoComp and OrmoCore) were used. The optimization of the process flow for the micro-mirrors for SMW applications will be described in detail.
Details
| Original language | English |
|---|---|
| Title of host publication | 2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC) |
| Place of Publication | Sibiu |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Pages | 398-404 |
| Number of pages | 7 |
| ISBN (electronic) | 978-1-6654-8947-8 |
| ISBN (print) | 978-1-6654-8948-5 |
| Publication status | Published - 13 Sept 2022 |
| Peer-reviewed | Yes |
Publication series
| Series | Electronics System-Integration Technology Conference, ESTC |
|---|---|
| ISSN | 2687-9700 |
Conference
| Title | 9th IEEE Electronics System-Integration Technology Conference |
|---|---|
| Abbreviated title | ESTC 2022 |
| Conference number | 9 |
| Duration | 13 - 16 September 2022 |
| Website | |
| Location | Ramada Hotel |
| City | Sibiu |
| Country | Romania |
External IDs
| ORCID | /0000-0002-0757-3325/work/139064794 |
|---|
Keywords
ASJC Scopus subject areas
Keywords
- 2PP-DLW (2-Photon-Polymerization Direct-Laser-Writing), BEOL (Back-End-Of-Line), Hybrid polymer, micro-mirror, O-RDL (Optical-Redistribution Layer), SMW (Single-Mode-Waveguide)