Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Suzanne Lancaster - , TUD Dresden University of Technology (Author)
  • Iciar Arnay - , Madrid Institute for Advanced Studies in Nanoscience (Author)
  • Ruben Guerrero - , Madrid Institute for Advanced Studies in Nanoscience, University of Castilla-La Mancha (Author)
  • Adrian Gudin - , Madrid Institute for Advanced Studies in Nanoscience (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics (Author)
  • Paolo Perna - , Madrid Institute for Advanced Studies in Nanoscience (Author)
  • Stefan Slesazeck - , TUD Dresden University of Technology (Author)

Abstract

Direct integration of ferroelectric Hf0.5Zr0.5O2 (HZO) on the inert surface of graphene is challenging. Here, using nucleation layers to promote atomic layer deposition of HZO was investigated. Different metals were deposited as nucleation layers via dc sputtering. Ta, which oxidizes in air to form a sub-stoichiometric oxide, was compared to Pt, which offers a more stable electrode. For thicker interlayers, Ta leads to unstable switching behavior of the HZO film. Conversely, at smaller thicknesses, a higher Pr can be achieved with an oxidized Ta interlayer. In both cases, Pt offers higher endurance. The choice of interlayer may strongly depend on the required application.

Details

Original languageEnglish
Title of host publication2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
ISBN (electronic)978-1-6654-4841-3
ISBN (print)978-1-6654-4842-0
Publication statusPublished - 2022
Peer-reviewedYes

Publication series

SeriesIEEE International Symposium on Applications of Ferroelectrics (ISAF)

Conference

TitleJoint Conference of the 2022 IEEE International Symposium on Applications of Ferroelectrics, 2022 Piezoresponse Force Microscopy International Workshop & 2022 European Conference on Applications of Polar Dielectrics
Abbreviated titleISAF-PFM-ECAPD 2022
Duration27 June - 1 July 2022
Website
LocationVinci International Congress Center & Université de Tours
CityTours
CountryFrance

External IDs

ORCID /0000-0003-3814-0378/work/142256147

Keywords

Keywords

  • atomic layer deposition, ferroelectrics, graphene, hafnium zirconium oxide, spintronics