Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Suzanne Lancaster - , Technische Universität Dresden (Autor:in)
  • Iciar Arnay - , Instituto Madrileño de Estudios Avanzados en Nanociencia (Autor:in)
  • Ruben Guerrero - , Instituto Madrileño de Estudios Avanzados en Nanociencia, University of Castilla-La Mancha (Autor:in)
  • Adrian Gudin - , Instituto Madrileño de Estudios Avanzados en Nanociencia (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik (Autor:in)
  • Paolo Perna - , Instituto Madrileño de Estudios Avanzados en Nanociencia (Autor:in)
  • Stefan Slesazeck - , Technische Universität Dresden (Autor:in)

Abstract

Direct integration of ferroelectric Hf0.5Zr0.5O2 (HZO) on the inert surface of graphene is challenging. Here, using nucleation layers to promote atomic layer deposition of HZO was investigated. Different metals were deposited as nucleation layers via dc sputtering. Ta, which oxidizes in air to form a sub-stoichiometric oxide, was compared to Pt, which offers a more stable electrode. For thicker interlayers, Ta leads to unstable switching behavior of the HZO film. Conversely, at smaller thicknesses, a higher Pr can be achieved with an oxidized Ta interlayer. In both cases, Pt offers higher endurance. The choice of interlayer may strongly depend on the required application.

Details

OriginalspracheEnglisch
Titel2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
ISBN (elektronisch)978-1-6654-4841-3
ISBN (Print)978-1-6654-4842-0
PublikationsstatusVeröffentlicht - 2022
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE International Symposium on Applications of Ferroelectrics (ISAF)

Konferenz

TitelJoint Conference of the 2022 IEEE International Symposium on Applications of Ferroelectrics, 2022 Piezoresponse Force Microscopy International Workshop & 2022 European Conference on Applications of Polar Dielectrics
KurztitelISAF-PFM-ECAPD 2022
Dauer27 Juni - 1 Juli 2022
Webseite
OrtVinci International Congress Center & Université de Tours
StadtTours
LandFrankreich

Externe IDs

ORCID /0000-0003-3814-0378/work/142256147

Schlagworte

Schlagwörter

  • atomic layer deposition, ferroelectrics, graphene, hafnium zirconium oxide, spintronics