Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Direct integration of ferroelectric Hf0.5Zr0.5O2 (HZO) on the inert surface of graphene is challenging. Here, using nucleation layers to promote atomic layer deposition of HZO was investigated. Different metals were deposited as nucleation layers via dc sputtering. Ta, which oxidizes in air to form a sub-stoichiometric oxide, was compared to Pt, which offers a more stable electrode. For thicker interlayers, Ta leads to unstable switching behavior of the HZO film. Conversely, at smaller thicknesses, a higher Pr can be achieved with an oxidized Ta interlayer. In both cases, Pt offers higher endurance. The choice of interlayer may strongly depend on the required application.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF) |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers (IEEE) |
| ISBN (elektronisch) | 978-1-6654-4841-3 |
| ISBN (Print) | 978-1-6654-4842-0 |
| Publikationsstatus | Veröffentlicht - 2022 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | IEEE International Symposium on Applications of Ferroelectrics (ISAF) |
|---|
Konferenz
| Titel | Joint Conference of the 2022 IEEE International Symposium on Applications of Ferroelectrics, 2022 Piezoresponse Force Microscopy International Workshop & 2022 European Conference on Applications of Polar Dielectrics |
|---|---|
| Kurztitel | ISAF-PFM-ECAPD 2022 |
| Dauer | 27 Juni - 1 Juli 2022 |
| Webseite | |
| Ort | Vinci International Congress Center & Université de Tours |
| Stadt | Tours |
| Land | Frankreich |
Externe IDs
| ORCID | /0000-0003-3814-0378/work/142256147 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- atomic layer deposition, ferroelectrics, graphene, hafnium zirconium oxide, spintronics