On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • D.K. Simon - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • P.M. Jordan - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • T. Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • I. Dirnstorfer - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Details

Original languageEnglish
Pages (from-to)28215–28222
Number of pages8
JournalACS Applied Materials and Interfaces
Volume7
Issue number51
Publication statusPublished - 2015
Peer-reviewedYes

External IDs

Scopus 84952880572

Keywords

Library keywords