Non-Volatile Inverter With 3D Cylindrical Metal-Ferroelectric-Metal Capacitor Realizing Digitized Voltage Output for Computing-In-Memory
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
A non-volatile Hf0.5Zr0.5O2(HZO)-based Metal-Ferroelectric-Metal (MFM) inverter enabling AND/XNOR operations for Computation-in-Memory CiM) is proposed. Owing to the symmetric threshold voltage Vth) shift in the nFET and pFET of the MFM inverter, a digitized output after the multiply operation is successfully demonstrated for the first time with non-volatile memory, enabling the high precision CiM. In addition, the MFM inverter has the advantage of a large memory window (MW) because a large partial programming voltage is structurally applied to the MFM capacitor. Moreover, the MW and the endurance were intensively studied to clarify the key factors for reliable operation. Together with the process compatible FeRAM as a working memory, the MFM inverter has the potential to achieve low-power, high-density, and high precision non-volatile CiM systems.
Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings - 51st IEEE European Solid-State Electronics Research Conference, ESSERC 2025 |
| Publisher | IEEE Computer Society |
| Pages | 61-64 |
| Number of pages | 4 |
| ISBN (electronic) | 979-8-3315-2539-2, 979-8-3315-2538-5 |
| ISBN (print) | 979-8-3315-2540-8 |
| Publication status | Published - 2025 |
| Peer-reviewed | Yes |
Publication series
| Series | European Solid-State Circuits Conference |
|---|---|
| ISSN | 1930-8833 |
Conference
| Title | 51st IEEE European Solid-State Electronics Research Conference |
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| Abbreviated title | ESSERC 2025 |
| Conference number | 51 |
| Duration | 8 - 11 September 2025 |
| Website | |
| Location | Technische Universität München |
| City | München |
| Country | Germany |
External IDs
| ORCID | /0000-0003-3814-0378/work/202352139 |
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Keywords
ASJC Scopus subject areas
Keywords
- Computing in Memory, Ferroelectric, HfZrO