Next generation ferroelectric materials for semiconductor process integration and their applications
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Details
Original language | English |
---|---|
Article number | 100901 |
Journal | Journal of applied physics |
Volume | 129 |
Publication status | Published - 14 Mar 2021 |
Peer-reviewed | Yes |
External IDs
Scopus | 85102461997 |
---|