Negative capacitance in HfO2- and ZrO2-based ferroelectrics

Research output: Contribution to book/Conference proceedings/Anthology/ReportChapter in book/Anthology/ReportContributedpeer-review

Contributors

  • Michael Hoffmann - , TUD Dresden University of Technology (Author)
  • Stefan Slesazeck - , TUD Dresden University of Technology (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • Cheol Seong Hwang - , Seoul National University (Author)

Abstract

The use of ferroelectric negative capacitance (NC) is suggested to be an appealing contender to reduce the subthreshold swing of field-effect transistors and thus the power dissipation in integrated logic circuits. Ferroelectric thin films based on HfO2 and ZrO2 are most promising for such applications due to their scalability and compatibility with current integration processes. To assess this potential, it is important to distinguish various reported NC effects, which can have rather different physical origins. While transient NC effects during polarization switching are often reported and are accompanied by a hysteresis, stabilized NC in HfO2- and ZrO2-based ferroelectrics without hysteresis is still controversially discussed. Here, we review the experimental reports on NC in these ferroelectric materials and discuss their significance concerning applications. Overall, it is concluded that stabilized NC in HfO2- and ZrO2-based ferroelectrics has yet to be demonstrated unambiguously, although recent works have reported promising results.

Details

Original languageEnglish
Title of host publicationFerroelectricity in Doped Hafnium Oxide
PublisherElsevier
Pages473-493
Number of pages21
ISBN (electronic)9780081024300
ISBN (print)9780081024317
Publication statusPublished - 1 Jan 2019
Peer-reviewedYes

External IDs

ORCID /0000-0003-3814-0378/work/142256227

Keywords

ASJC Scopus subject areas

Keywords

  • Ferroelectric, Hysteresis, Negative capacitance, Stabilization, Steep slope, Subthreshold swing