Negative capacitance in HfO2- and ZrO2-based ferroelectrics

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in Buch/Sammelband/GutachtenBeigetragenBegutachtung

Beitragende

  • Michael Hoffmann - , Technische Universität Dresden (Autor:in)
  • Stefan Slesazeck - , Technische Universität Dresden (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, Technische Universität Dresden (Autor:in)
  • Cheol Seong Hwang - , Seoul National University (Autor:in)

Abstract

The use of ferroelectric negative capacitance (NC) is suggested to be an appealing contender to reduce the subthreshold swing of field-effect transistors and thus the power dissipation in integrated logic circuits. Ferroelectric thin films based on HfO2 and ZrO2 are most promising for such applications due to their scalability and compatibility with current integration processes. To assess this potential, it is important to distinguish various reported NC effects, which can have rather different physical origins. While transient NC effects during polarization switching are often reported and are accompanied by a hysteresis, stabilized NC in HfO2- and ZrO2-based ferroelectrics without hysteresis is still controversially discussed. Here, we review the experimental reports on NC in these ferroelectric materials and discuss their significance concerning applications. Overall, it is concluded that stabilized NC in HfO2- and ZrO2-based ferroelectrics has yet to be demonstrated unambiguously, although recent works have reported promising results.

Details

OriginalspracheEnglisch
TitelFerroelectricity in Doped Hafnium Oxide
Herausgeber (Verlag)Elsevier
Seiten473-493
Seitenumfang21
ISBN (elektronisch)9780081024300
ISBN (Print)9780081024317
PublikationsstatusVeröffentlicht - 1 Jan. 2019
Peer-Review-StatusJa

Externe IDs

ORCID /0000-0003-3814-0378/work/142256227

Schlagworte

ASJC Scopus Sachgebiete

Schlagwörter

  • Ferroelectric, Hysteresis, Negative capacitance, Stabilization, Steep slope, Subthreshold swing