Monodisperse aerosol particle deposition: Prospects for nanoelectronics

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • W Prost - (Author)
  • FE Kruis - (Author)
  • F Otten - (Author)
  • K Nielsch - , University of Duisburg-Essen (Author)
  • B Rellinghaus - , University of Duisburg-Essen (Author)
  • U Auer - (Author)
  • A Peled - (Author)
  • EF Wassermann - (Author)
  • Heinz Fissan - (Author)
  • FJ Tegude - (Author)

Details

Original languageEnglish
Pages (from-to)535-538
Number of pages4
JournalMicroelectronic Engineering
Volume42
Publication statusPublished - 1 Mar 1998
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 0031674745

Keywords