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Molecular beam deposited ZrO2 on GaN and Si/TiN: A comparison

Research output: Contribution to conferences › Paper › Contributed

Contributors

A. Freese - (Author)
M. Grube - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
M. Geidel - (Author)
B. Adolphi - , Chair of Microsystems Technology (Author)
A. Wachowiak - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
S. Schmult - , Chair of Nanoelectronics (Author)
T. Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Details

Original language	English
Publication status	Published - 2012
Peer-reviewed	No

External IDs

ORCID	/0000-0003-3814-0378/work/142256085

Keywords