Mobility Investigations on Strained 30-nm High-k Metal Gate MOSFETs by Geometrical Magnetoresistance Effect
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Contributors
Abstract
In this paper, we present mobility investigations of strained nMOS and pMOS short-channel transistors with dimensions down to 30-nm gate length. Using the geometrical magnetoresistance (MR) effect, carrier mobility of electrons and holes in the inversion channel of a recent state-of-the-art CMOS technology is presented from linear to saturation operation conditions. The MR effect allows for a more direct access to the carrier mobility compared with the conventional current/voltage and capacitance/voltage mobility derivation methods, in which series resistance, inversion charge density, and effective channel length are necessary to extract the mobility values of the short-channel devices. In another way, the MR effect can help to disentangle the performance gain of the strained state-of-the art devices to changes in channel mobility or device connection, e.g., series resistance effects
Details
Original language | English |
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Pages (from-to) | 1819 - 1925 |
Journal | IEEE transactions on electron devices : ED |
Volume | 62 |
Issue number | 6 |
Publication status | Published - 2015 |
Peer-reviewed | Yes |
External IDs
WOS | 000355405800021 |
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Scopus | 84930225698 |