Light-induced degradation in annealed and electron irradiated silicon

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Kevin Lauer - , CiS Research Institute for Micro Sensors GmbH, Ilmenau University of Technology (Author)
  • Stefan Krischok - , Ilmenau University of Technology (Author)
  • Thomas Klein - , CiS Research Institute for Micro Sensors GmbH (Author)
  • Mario Bähr - , CiS Research Institute for Micro Sensors GmbH (Author)
  • Alexander Lawerenz - , CiS Research Institute for Micro Sensors GmbH (Author)
  • Ralf Röder - , CiS Research Institute for Micro Sensors GmbH (Author)
  • Thomas Ortlepp - , CiS Research Institute for Micro Sensors GmbH (Author)
  • U. Gohs - , Institute of Lightweight Engineering and Polymer Technology, Leibniz Institute of Polymer Research Dresden (Author)

Details

Original languageEnglish
Article number1900284
Number of pages6
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume216
Issue number17
Publication statusPublished - 11 Sept 2019
Peer-reviewedYes

External IDs

Scopus 85068688263

Keywords

Keywords

  • electron beam irradiation, light-induced degradation, silicon