Kinetic of phase transformation of SrBi2Ta2O9 deposited by metalorganic decomposition on platinum electrodes

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Manfred Moert - , Infineon Technologies AG (Author)
  • T. Mikolajick - , Infineon Technologies AG (Author)
  • G. Schindler - , Infineon Technologies AG (Author)
  • N. Nagel - , Infineon Technologies AG (Author)
  • W. Hartner - , Infineon Technologies AG (Author)
  • C. Dehm - , Infineon Technologies AG (Author)
  • H. Kohlstedt - , Jülich Research Centre (Author)
  • R. Waser - , Jülich Research Centre (Author)

Abstract

Phase transformation kinetics of SrBi2Ta2O9 thin films was carried out using metalorganic decomposition on platinium electrodes. A two-dimensional growth mechanism at a decreasing nucleation rate was also studied. It was found that activation energy for the phase transformation is estimated to be 318 kJ/mol.

Details

Original languageEnglish
Pages (from-to)4410-4412
Number of pages3
JournalApplied physics letters
Volume81
Issue number23
Publication statusPublished - 2 Dec 2002
Peer-reviewedYes
Externally publishedYes

External IDs

ORCID /0000-0003-3814-0378/work/155840905

Keywords

ASJC Scopus subject areas