This paper describes open loop control measures for performance improvements of electrostatic micromirrors in context with foveation scanning for 3D time-of-flight cameras. The generation of high accuracy scanning trajectories with scene dependent variable slope is realized by a flatness-based open loop control scheme. Previous flatness-based control solutions have shown unfavorable residual oscillations excited at slope reverse points and high drive currents at zero-crossing comb deflection due to square-root voltage law for electrostatic mirror control. Jerk limited trajectories are introduced for reduction of residual oscillations and their impact on scanning trajectory properties is expressed by design formulas. A considerable reduction of zero-crossing drive currents can be achieved by using a dual-comb control law at small deflection angles reducing the effective drive voltage slope. The paper addresses the basic micromirror models and describes in detail the jerk and current limitation control measures in context with the flatness-based control concept. Experimental results prove the adequacy of the proposed solutions.