Investigation of the reliability degradation of scaled SONOS memory transistors

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • J. Ocker - (Author)
  • S. Slesazeck - (Author)
  • R. Hoffmann - (Author)
  • V. Beyer - (Author)
  • A. Skouris - (Author)
  • R. Srowik - (Author)
  • S. Buschbeck - (Author)
  • S. Gunther - (Author)
  • T. Mikolajick - , Chair of Nanoelectronics (Author)

Details

Original languageEnglish
Title of host publication2015 IEEE International Integrated Reliability Workshop Final Report (IIRW)
PublisherIEEE Xplore
Number of pages4
Volume2015
ISBN (electronic)978-1-4673-7396-8, 978-1-4673-7394-4
ISBN (print)978-1-4673-7395-1
Publication statusPublished - 2016
Peer-reviewedYes

Publication series

SeriesIEEE International Integrated Reliability Workshop (IIRW)
ISSN1930-8841

External IDs

Scopus 84964617155

Keywords