Interpretation of azimuthal angle dependence of periodic gratings in Mueller matrix spectroscopic ellipsometry

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

Anett Heinrich - (Author)
Joerg Bischoff - (Author)
Kurt Meiner - (Author)
Uwe Richter - (Author)
Thomas Mikolajick - , Institute of Semiconductors and Microsystems, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
Ingo Dirnstorfer - (Author)

Original language	English
Pages (from-to)	604-610
Journal	Journal of the Optical Society of America : JOSA; A, Optics, image science, and vision
Volume	32
Issue number	4
Publication status	Published - 2015
Peer-reviewed	Yes

WOS	000352209700013
Scopus	84982179891