Interplay between Switching and Retention in HfO 2 -Based Ferroelectric FETs
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Contributors
Abstract
Long data retention is a critical requirement for many of the potential applications of HfO 2 -based ferroelectric field-effect transistors (FeFETs). However, methods for its rapid assessment are still missing. In this article, we report a detailed investigation of the retention and switching properties of FeFETs fabricated in the 28-nm high- {k} metal gate technology. We identify a clear correlation between the two properties and propose a method for fast prediction of the device retention behavior, which can be easily adopted to judge different fabrication processes. Finally, we extend the validity of the method to a direct assessment of disturb-free operating conditions, which may be particularly valuable for FeFET array operation.
Details
| Original language | English |
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| Article number | 9132656 |
| Pages (from-to) | 3466-3471 |
| Number of pages | 6 |
| Journal | IEEE transactions on electron devices : ED |
| Volume | 67 |
| Issue number | 8 |
| Publication status | Published - Aug 2020 |
| Peer-reviewed | Yes |
External IDs
| ORCID | /0000-0003-3814-0378/work/142256203 |
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Keywords
ASJC Scopus subject areas
Keywords
- Disturb, ferroelectric field-effect transistor (FeFET), hafnium oxide (HfO₂), retention, switching