Interplay between Switching and Retention in HfO 2 -Based Ferroelectric FETs

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Halid Mulaosmanovic - , TUD Dresden University of Technology (Author)
  • Franz Muller - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Maximilian Lederer - , Chair of Experimental Physics / Photophysics, Ferroelectric Memory GmbH (Author)
  • Tarek Ali - , Ferroelectric Memory GmbH (Author)
  • Raik Hoffmann - , Ferroelectric Memory GmbH (Author)
  • Konrad Seidel - , Ferroelectric Memory GmbH (Author)
  • Haidi Zhou - , Ferroelectric Memory GmbH (Author)
  • Johannes Ocker - , Global Foundries, Inc. (Author)
  • Stefan Mueller - , Global Foundries, Inc. (Author)
  • Stefan Dunkel - , Global Foundries, Inc. (Author)
  • Dominik Kleimaier - , TUD Dresden University of Technology (Author)
  • Johannes Muller - , TUD Dresden University of Technology (Author)
  • Martin Trentzsch - , TUD Dresden University of Technology (Author)
  • Sven Beyer - , TUD Dresden University of Technology (Author)
  • Evelyn T. Breyer - , TUD Dresden University of Technology (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • Stefan Slesazeck - , TUD Dresden University of Technology (Author)

Abstract

Long data retention is a critical requirement for many of the potential applications of HfO 2 -based ferroelectric field-effect transistors (FeFETs). However, methods for its rapid assessment are still missing. In this article, we report a detailed investigation of the retention and switching properties of FeFETs fabricated in the 28-nm high- {k} metal gate technology. We identify a clear correlation between the two properties and propose a method for fast prediction of the device retention behavior, which can be easily adopted to judge different fabrication processes. Finally, we extend the validity of the method to a direct assessment of disturb-free operating conditions, which may be particularly valuable for FeFET array operation.

Details

Original languageEnglish
Article number9132656
Pages (from-to)3466-3471
Number of pages6
JournalIEEE transactions on electron devices : ED
Volume67
Issue number8
Publication statusPublished - Aug 2020
Peer-reviewedYes

External IDs

ORCID /0000-0003-3814-0378/work/142256203

Keywords

Keywords

  • Disturb, ferroelectric field-effect transistor (FeFET), hafnium oxide (HfO₂), retention, switching