Interplay between Switching and Retention in HfO 2 -Based Ferroelectric FETs
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Long data retention is a critical requirement for many of the potential applications of HfO 2 -based ferroelectric field-effect transistors (FeFETs). However, methods for its rapid assessment are still missing. In this article, we report a detailed investigation of the retention and switching properties of FeFETs fabricated in the 28-nm high- {k} metal gate technology. We identify a clear correlation between the two properties and propose a method for fast prediction of the device retention behavior, which can be easily adopted to judge different fabrication processes. Finally, we extend the validity of the method to a direct assessment of disturb-free operating conditions, which may be particularly valuable for FeFET array operation.
Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 9132656 |
| Seiten (von - bis) | 3466-3471 |
| Seitenumfang | 6 |
| Fachzeitschrift | IEEE transactions on electron devices : ED |
| Jahrgang | 67 |
| Ausgabenummer | 8 |
| Publikationsstatus | Veröffentlicht - Aug. 2020 |
| Peer-Review-Status | Ja |
Externe IDs
| ORCID | /0000-0003-3814-0378/work/142256203 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Disturb, ferroelectric field-effect transistor (FeFET), hafnium oxide (HfO₂), retention, switching