INTEGRATED PROCESSING OF STACKED-GATE HETEROSTRUCTURES - PLASMA-ASSISTED LOW-TEMPERATURE PROCESSING COMBINED WITH RAPID THERMAL HIGH-TEMPERATURE PROCESSING

Research output: Contribution to journal › Research article › Contributed

Contributors

  • V MISRA - (Author)
  • S HATTANGADY - (Author)
  • XL XU - (Author)
  • MJ WATKINS - (Author)
  • B HORNUNG - (Author)
  • G LUCOVSKY - (Author)
  • JJ WORTMAN - (Author)
  • U EMMERICHS - (Author)
  • C MEYER - (Author)
  • H Kurz - (Author)
  • Karl Leo - , Chair of Opto-Electronics (Author)

Details

Original languageEnglish
Pages (from-to)209-214
Number of pages6
JournalMicroelectronic Engineering
Issue number2-4
Publication statusPublished - 1994
Peer-reviewedNo

External IDs

Scopus 0028480395