Influence of gate length on ESD-performance for deep sub micron CMOS technology

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • K. Bock - , Chair of Electronic Packaging Technology, Interuniversitair Micro-Elektronica Centrum (Author)
  • B. Keppens - , Interuniversitair Micro-Elektronica Centrum (Author)
  • V. De Heyn - , Interuniversitair Micro-Elektronica Centrum (Author)
  • G. Groeseneken - , Interuniversitair Micro-Elektronica Centrum (Author)
  • L. Y. Ching - , Interuniversitair Micro-Elektronica Centrum (Author)
  • A. Naem - , Interuniversitair Micro-Elektronica Centrum (Author)

Abstract

The electrostatic discharges (ESD) of grounded-gate nMOS structures was investigated for a standard 0.25 μm CMOS epitaxial layer based technology. Very high It2-values were obtained, in the range between 10 and 15 mA/μm, and HBM thresholds of 15-30 V/μm. Unexpectedly however, the shortest gate lengths showed lower thresholds that lead to an optimum performance for gate lengths of about 1 μm. Failure analysis and device simulations confirmed the gate length effect as a real device effect under the CMOS technology and the device design. Finally, the strong impact of the failure criterion on the second breakdown current was demonstrated, highlighting the need for a standardization of the TLP technology and the It2 measurement.

Details

Original languageEnglish
Title of host publicationProceedings of the 1999 EOS/ESD Symposium 'Electrical Overstress/Electrostatic Discharge
PublisherESD Assoc
Pages95-104
Number of pages10
ISBN (print)158537007X
Publication statusPublished - 1999
Peer-reviewedYes

Publication series

Series Electrical Overstress Electrostatic Discharge Symposium proceedings
ISSN0739-5159

Conference

TitleProceedings of the 1999 EOS/ESD Symposium 'Electrical Overstress/Electrostatic Discharge'
Duration28 - 30 September 1999
CityOrlando, FL, USA

External IDs

ORCID /0000-0002-0757-3325/work/139064983

Keywords