Influence of gate length on ESD-performance for deep sub micron CMOS technology
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
The electrostatic discharges (ESD) of grounded-gate nMOS structures was investigated for a standard 0.25 μm CMOS epitaxial layer based technology. Very high It2-values were obtained, in the range between 10 and 15 mA/μm, and HBM thresholds of 15-30 V/μm. Unexpectedly however, the shortest gate lengths showed lower thresholds that lead to an optimum performance for gate lengths of about 1 μm. Failure analysis and device simulations confirmed the gate length effect as a real device effect under the CMOS technology and the device design. Finally, the strong impact of the failure criterion on the second breakdown current was demonstrated, highlighting the need for a standardization of the TLP technology and the It2 measurement.
Details
Original language | English |
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Title of host publication | Proceedings of the 1999 EOS/ESD Symposium 'Electrical Overstress/Electrostatic Discharge |
Publisher | ESD Assoc |
Pages | 95-104 |
Number of pages | 10 |
ISBN (print) | 158537007X |
Publication status | Published - 1999 |
Peer-reviewed | Yes |
Publication series
Series | Electrical Overstress Electrostatic Discharge Symposium proceedings |
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ISSN | 0739-5159 |
Conference
Title | Proceedings of the 1999 EOS/ESD Symposium 'Electrical Overstress/Electrostatic Discharge' |
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Duration | 28 - 30 September 1999 |
City | Orlando, FL, USA |
External IDs
ORCID | /0000-0002-0757-3325/work/139064983 |
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