Influence of gate length on ESD-performance for deep sub micron CMOS technology
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
The electrostatic discharges (ESD) of grounded-gate nMOS structures was investigated for a standard 0.25 μm CMOS epitaxial layer based technology. Very high It2-values were obtained, in the range between 10 and 15 mA/μm, and HBM thresholds of 15-30 V/μm. Unexpectedly however, the shortest gate lengths showed lower thresholds that lead to an optimum performance for gate lengths of about 1 μm. Failure analysis and device simulations confirmed the gate length effect as a real device effect under the CMOS technology and the device design. Finally, the strong impact of the failure criterion on the second breakdown current was demonstrated, highlighting the need for a standardization of the TLP technology and the It2 measurement.
Details
Originalsprache | Englisch |
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Titel | Proceedings of the 1999 EOS/ESD Symposium 'Electrical Overstress/Electrostatic Discharge |
Herausgeber (Verlag) | ESD Assoc |
Seiten | 95-104 |
Seitenumfang | 10 |
ISBN (Print) | 158537007X |
Publikationsstatus | Veröffentlicht - 1999 |
Peer-Review-Status | Ja |
Publikationsreihe
Reihe | Electrical Overstress Electrostatic Discharge Symposium proceedings |
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ISSN | 0739-5159 |
Konferenz
Titel | Proceedings of the 1999 EOS/ESD Symposium 'Electrical Overstress/Electrostatic Discharge' |
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Dauer | 28 - 30 September 1999 |
Stadt | Orlando, FL, USA |
Externe IDs
ORCID | /0000-0002-0757-3325/work/139064983 |
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