In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices

Research output: Contribution to journal › Research article › Contributed

Contributors

Zhongquan Liao - , Chair of Materials Science and Nanotechnology, Dresden Center for Nanoanalysis (DCN) (Author)
Martin Gall - (Author)
Kong Boon Yeap - (Author)
Christoph Sander - (Author)
Andre Clausner - (Author)
Uwe Muehle - (Author)
Juergen Gluch - (Author)
Yvonne Standke - (Author)
Oliver Aubel - (Author)
Armand Beyer - (Author)
Meike Hauschildt - (Author)
Ehrenfried Zschech - , Fraunhofer Institute for Ceramic Technologies and Systems (Author)

Scopus	84941241944