Improvement of Al2O3 Passivation by Ti-Doping

Research output: Contribution to conferences › Paper › Contributed › peer-review

Contributors

  • F. Benner - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • M. Knaut - (Author)
  • P. M. Jordan - (Author)
  • I. Dirnstorfer - (Author)
  • J. Ocker - (Author)
  • J. W. Bartha - , Chair of Semiconductors (Author)
  • T. Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Details

Original languageEnglish
Pages1156-1161
Number of pages6
Publication statusPublished - 2013
Peer-reviewedYes

External IDs

ORCID /0000-0003-3814-0378/work/142256086

Keywords

Keywords

  • Lifetime, Passivation, TiO2, Al2O3