HfO2-based ferroelectric FETs: Performance of single devices and mini-arrays

Research output: Contribution to conferencesPaperContributedpeer-review

Contributors

  • Halid Mulaosmanovic - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Franz Muller - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Evelyn T. Breyer - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Stefan Dunkel - , Global Foundries Dresden (Author)
  • Martin Trentzsch - , Global Foundries Dresden (Author)
  • Sven Beyer - , Global Foundries Dresden (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

Ferroelectric field-effect transistors (FeFETs) based on ferroelectric (FE) HfO2 are raising strong interest as potential nonvolatile memory elements [1]. In a FeFET, the FE layer is integrated in the gate stack (Fig. 1) and the memory effect relies on its two stable polarization states ('up' and 'down'), which correspond to two distinct threshold voltage VT values (high- VT and low- VT state, respectively) of the transistor. While the initial assessment of a memory technology usually starts with considering single devices, the further optimization and qualification for memory applications requires the study of array structures. Single FeFETs often exhibit excellent switching performance and large memory window (MW) [2]. Nevertheless, FeFETs densely packed within arrays may present a noticeably lower performance, which is a consequence of a different electrical environment (write/read disturbs, different resistive and capacitive loads etc.) with respect to an isolated device.

Details

Original languageEnglish
Pages146-147
Number of pages2
Publication statusPublished - Aug 2020
Peer-reviewedYes

Conference

Title2020 International Symposium on VLSI Technology, Systems and Applications
Abbreviated titleVLSI-TSA 2020
Duration14 August - 13 September 2020
LocationOnline
CityHsinchu
CountryTaiwan, Province of China

External IDs

ORCID /0000-0003-3814-0378/work/142256209