HfO2-based ferroelectric FETs: Performance of single devices and mini-arrays

Research output: Contribution to conferencesPaperContributedpeer-review

Contributors

  • Halid Mulaosmanovic - , TUD Dresden University of Technology (Author)
  • Franz Muller - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Evelyn T. Breyer - , Global Foundries, Inc. (Author)
  • Stefan Dunkel - , TUD Dresden University of Technology (Author)
  • Martin Trentzsch - , TUD Dresden University of Technology (Author)
  • Sven Beyer - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • Stefan Slesazeck - , TUD Dresden University of Technology (Author)

Abstract

Ferroelectric field-effect transistors (FeFETs) based on ferroelectric (FE) HfO2 are raising strong interest as potential nonvolatile memory elements [1]. In a FeFET, the FE layer is integrated in the gate stack (Fig. 1) and the memory effect relies on its two stable polarization states ('up' and 'down'), which correspond to two distinct threshold voltage VT values (high- VT and low- VT state, respectively) of the transistor. While the initial assessment of a memory technology usually starts with considering single devices, the further optimization and qualification for memory applications requires the study of array structures. Single FeFETs often exhibit excellent switching performance and large memory window (MW) [2]. Nevertheless, FeFETs densely packed within arrays may present a noticeably lower performance, which is a consequence of a different electrical environment (write/read disturbs, different resistive and capacitive loads etc.) with respect to an isolated device.

Details

Original languageEnglish
Pages146-147
Number of pages2
Publication statusPublished - Aug 2020
Peer-reviewedYes

Conference

Title2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020
Duration10 - 13 August 2020
CityHsinchu
CountryTaiwan, Province of China

External IDs

ORCID /0000-0003-3814-0378/work/142256209