HfO2-based ferroelectric FETs: Performance of single devices and mini-arrays

Publikation: Beitrag zu KonferenzenPaperBeigetragenBegutachtung

Beitragende

  • Halid Mulaosmanovic - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Franz Muller - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Evelyn T. Breyer - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Stefan Dunkel - , Global Foundries Dresden (Autor:in)
  • Martin Trentzsch - , Global Foundries Dresden (Autor:in)
  • Sven Beyer - , Global Foundries Dresden (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

Ferroelectric field-effect transistors (FeFETs) based on ferroelectric (FE) HfO2 are raising strong interest as potential nonvolatile memory elements [1]. In a FeFET, the FE layer is integrated in the gate stack (Fig. 1) and the memory effect relies on its two stable polarization states ('up' and 'down'), which correspond to two distinct threshold voltage VT values (high- VT and low- VT state, respectively) of the transistor. While the initial assessment of a memory technology usually starts with considering single devices, the further optimization and qualification for memory applications requires the study of array structures. Single FeFETs often exhibit excellent switching performance and large memory window (MW) [2]. Nevertheless, FeFETs densely packed within arrays may present a noticeably lower performance, which is a consequence of a different electrical environment (write/read disturbs, different resistive and capacitive loads etc.) with respect to an isolated device.

Details

OriginalspracheEnglisch
Seiten146-147
Seitenumfang2
PublikationsstatusVeröffentlicht - Aug. 2020
Peer-Review-StatusJa

Konferenz

Titel2020 International Symposium on VLSI Technology, Systems and Applications
KurztitelVLSI-TSA 2020
Dauer14 August - 13 September 2020
OrtOnline
StadtHsinchu
LandTaiwan

Externe IDs

ORCID /0000-0003-3814-0378/work/142256209