Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

This paper describes the open-loop and closed-loop control for quasi-static microscanners exploiting the inherent flatness property. The developed nonlinear control method is verified on a gimbaled quasi-static/resonant scanning micro mirror with electrostatic staggered vertical comb (SVC) drive actuation. Based on a mechatronic micro mirror model, we present a flatness-based feed forward control method using jerk-limited trajectories to reduce undesired oscillations. For the closed-loop control we introduce a stabilizing linearizing feedback including an extended Luenberger observer for improvement of the command tracking in presence of model inaccuracies. The experimental results for both scenarios, open-loop and closed-loop control, are compared with simulations and further assessed in terms of performance and feasibility for industrial application.

Details

Original languageEnglish
Pages (from-to)318-331
Number of pages14
JournalMechatronics
Volume56
Publication statusPublished - Dec 2018
Peer-reviewedYes

External IDs

WOS 000454382300029
ORCID /0000-0003-3259-4571/work/142249643
Scopus 85017175864

Keywords

Keywords

  • Electrostatic staggered vertical comb, Flatness-based open-loop and closed-loop control, Global extended Luenberger observer, Jerk-limited triangle trajectory, MEMS, Quasi-static/resonant microscanner