Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Buch/Sammelband/Gutachten › Beigetragen › Begutachtung
Beitragende
Abstract
This paper describes the open-loop and closed-loop control for quasi-static microscanners exploiting the inherent flatness property. The developed nonlinear control method is verified on a gimbaled quasi-static/resonant scanning micro mirror with electrostatic staggered vertical comb (SVC) drive actuation. Based on a mechatronic micro mirror model, we present a flatness-based feed forward control method using jerk-limited trajectories to reduce undesired oscillations. For the closed-loop control we introduce a stabilizing linearizing feedback including an extended Luenberger observer for improvement of the command tracking in presence of model inaccuracies. The experimental results for both scenarios, open-loop and closed-loop control, are compared with simulations and further assessed in terms of performance and feasibility for industrial application. (C) 2017 Elsevier Ltd. All rights reserved.
Details
Originalsprache | Englisch |
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Titel | Mechatronics |
Seiten | 318-331 |
Seitenumfang | 14 |
Band | Volume 56 |
Publikationsstatus | Veröffentlicht - Dez. 2018 |
Peer-Review-Status | Ja |
Externe IDs
Scopus | 85017175864 |
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WOS | 000454382300029 |
ORCID | /0000-0003-3259-4571/work/142249643 |
Schlagworte
Schlagwörter
- Microscanner