Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
This paper describes the open-loop and closed-loop control for quasi-static microscanners exploiting the inherent flatness property. The developed nonlinear control method is verified on a gimbaled quasi-static/resonant scanning micro mirror with electrostatic staggered vertical comb (SVC) drive actuation. Based on a mechatronic micro mirror model, we present a flatness-based feed forward control method using jerk-limited trajectories to reduce undesired oscillations. For the closed-loop control we introduce a stabilizing linearizing feedback including an extended Luenberger observer for improvement of the command tracking in presence of model inaccuracies. The experimental results for both scenarios, open-loop and closed-loop control, are compared with simulations and further assessed in terms of performance and feasibility for industrial application.
Details
Originalsprache | Englisch |
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Seiten (von - bis) | 318-331 |
Seitenumfang | 14 |
Fachzeitschrift | Mechatronics |
Jahrgang | 56 |
Publikationsstatus | Veröffentlicht - Dez. 2018 |
Peer-Review-Status | Ja |
Externe IDs
WOS | 000454382300029 |
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ORCID | /0000-0003-3259-4571/work/142249643 |
Scopus | 85017175864 |
Schlagworte
Schlagwörter
- Electrostatic staggered vertical comb, Flatness-based open-loop and closed-loop control, Global extended Luenberger observer, Jerk-limited triangle trajectory, MEMS, Quasi-static/resonant microscanner