Finite element analysis of uniaxial bending of ultra-thin silicon dies embedded in flexible foil substrates

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Contributors

  • Nagarajan Palavesam - , Chair of Electronic Packaging Technology, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT), Technical University of Munich (Author)
  • Christof Landesberger - , Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Christoph Kutter - , Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Karlheinz Bock - , Faculty of Electrical and Computer Engineering, Chair of Electronic Packaging Technology, Structure and Materials Mechanics Research Institute at the Dresden University of Technology (SWM) (Author)

Abstract

We report a Finite Element Model to calculate the bending stress of thin and ultra-thin silicon dies embedded in flexible foil substrates (chip-in-foil package) at lower bending radii. The values of fracture strength computed using Finite Element Analysis showed very good agreement with the experimental results. Furthermore, an increase in the fracture or critical stress (bending stress at fracture) of the dies due to embedding in flexible foil substrates was observed. Besides, the impact of foil material and thickness on the bending stress of ultra-thin silicon die is discussed by comparing two foil materials: Stainless Steel and Polyimide.

Details

Original languageGerman
Title of host publication2015 11th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)
Place of PublicationGlasgow
PublisherIEEE
Pages137-140
Number of pages4
ISBN (electronic)978-1-4799-8229-5, 978-1-4799-8228-8
Publication statusPublished - 2 Jul 2015
Peer-reviewedYes

Publication series

SeriesPh.D. Research in Microelectronics and Electronics (PRIME)
ISSN2641-5933

Conference

Title2015 11th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)
Duration29 June - 2 July 2015
LocationGlasgow, UK

External IDs

Scopus 84946846036
ORCID /0000-0002-0757-3325/work/139064859

Keywords

Keywords

  • Silicon, Stress, Finite element analysis, Steel, Polyimides, Substrates, Flexible electronics