Ferroelectric tunnel junctions based on ferroelectric-dielectric Hf0.5Zr0.5.O2/A12O3 capacitor stacks

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

Abstract

We report on a two-layer based ferroelectric tunnel junction with hafnium zirconium oxide (HZO) as the ferroelectric layer and aluminum oxide as the tunneling layer. The experimental results focus on optimizing the thicknesses of the layer stack. The device operation relies on the polarization reversal of the HZO layer, while electron tunneling occurs through the dielectric layer. The ferroelectric response of the HZO shows high remanent polarization values and good endurance with only weak wake-up and fatigue behavior. Adding the additional dielectric tunneling layer, the device becomes operational as a ferroelectric tunnel junction in the nanoampere current range. It shows good on/off ratios and promising retention behavior, paving the way for future applications as a polarization-based resistive memory device.

Details

Original languageEnglish
Title of host publication2018 48th European Solid-State Device Research Conference, ESSDERC 2018
PublisherEditions Frontieres
Pages142-145
Number of pages4
ISBN (electronic)978-1-5386-5401-9
Publication statusPublished - 8 Oct 2018
Peer-reviewedYes

Publication series

SeriesEuropean Solid-State Device Research Conference
Volume2018-September
ISSN1930-8876

Conference

Title48th European Solid-State Device Research Conference & 44th European Solid-State Circuits Conference
Abbreviated titleESSDERC-ESSCIRC 2018
Duration3 - 6 September 2018
CityDresden
CountryGermany

External IDs

Scopus 85056510997
ORCID /0000-0003-3814-0378/work/193705554

Keywords

Keywords

  • ferroelectric tunnel junction, Hf1-xZrxO2, memory