Ferroelectric tunnel junctions based on ferroelectric-dielectric Hf0.5Zr0.5.O2/A12O3 capacitor stacks

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

We report on a two-layer based ferroelectric tunnel junction with hafnium zirconium oxide (HZO) as the ferroelectric layer and aluminum oxide as the tunneling layer. The experimental results focus on optimizing the thicknesses of the layer stack. The device operation relies on the polarization reversal of the HZO layer, while electron tunneling occurs through the dielectric layer. The ferroelectric response of the HZO shows high remanent polarization values and good endurance with only weak wake-up and fatigue behavior. Adding the additional dielectric tunneling layer, the device becomes operational as a ferroelectric tunnel junction in the nanoampere current range. It shows good on/off ratios and promising retention behavior, paving the way for future applications as a polarization-based resistive memory device.

Details

OriginalspracheEnglisch
Titel2018 48th European Solid-State Device Research Conference, ESSDERC 2018
Herausgeber (Verlag)Editions Frontieres
Seiten142-145
Seitenumfang4
ISBN (elektronisch)978-1-5386-5401-9
PublikationsstatusVeröffentlicht - 8 Okt. 2018
Peer-Review-StatusJa

Publikationsreihe

ReiheEuropean Solid-State Device Research Conference
Band2018-September
ISSN1930-8876

Konferenz

Titel48th European Solid-State Device Research Conference & 44th European Solid-State Circuits Conference
KurztitelESSDERC-ESSCIRC 2018
Dauer3 - 6 September 2018
StadtDresden
LandDeutschland

Externe IDs

Scopus 85056510997
ORCID /0000-0003-3814-0378/work/193705554

Schlagworte

Schlagwörter

  • ferroelectric tunnel junction, Hf1-xZrxO2, memory