Ferroelectric HfO2-based Capacitors for FeRAM: Reliability from Field Cycling Endurance to Retention (invited)
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
When considering reliability concerns for introducing HfO2-based ferroelectric capacitors into production, polarization sensing issues caused by imprint have been shown to be the most critical. A common model for imprint in hafnium-zirconium oxide ferroelectric thin film capacitors has not yet been widely adopted. In this work, a widely accepted charge injection-based imprint model used for lead zircon ate-titanate thin film capacitors is adj usted and effectively fitted to the data of hafnium-zirconium oxide thin film capacitors. This confirms an interface-driven imprint mechanism for these devices and provides a method for benchmarking ten-year retention.
Details
| Original language | English |
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| Title of host publication | 2024 IEEE International Reliability Physics Symposium, IRPS 2024 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Pages | 1-10 |
| ISBN (electronic) | 979-8-3503-6976-2 |
| Publication status | Published - 2024 |
| Peer-reviewed | Yes |
| Externally published | Yes |
Publication series
| Series | IEEE International Reliability Physics Symposium Proceedings |
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| ISSN | 1541-7026 |
Conference
| Title | 2024 IEEE International Reliability Physics Symposium |
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| Abbreviated title | IRPS 2024 |
| Conference number | 62 |
| Duration | 14 - 18 April 2024 |
| Website | |
| Degree of recognition | International event |
| Location | Hilton DFW Lake |
| City | Grapevine |
| Country | United States of America |
External IDs
| ORCID | /0000-0003-3814-0378/work/163295407 |
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Keywords
ASJC Scopus subject areas
Keywords
- Ferroelectric, Hafnium-Zirconium Oxide, HZO, Imprint, Memory, Model, Retention