Ferroelectric HfO2-based Capacitors for FeRAM: Reliability from Field Cycling Endurance to Retention (invited)

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Pramoda Vishnumurthy - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Ruben Alcala - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Luis Azevedo Antunes - , Munich University of Applied Sciences (Author)
  • Alfred Kersch - , Munich University of Applied Sciences (Author)

Abstract

When considering reliability concerns for introducing HfO2-based ferroelectric capacitors into production, polarization sensing issues caused by imprint have been shown to be the most critical. A common model for imprint in hafnium-zirconium oxide ferroelectric thin film capacitors has not yet been widely adopted. In this work, a widely accepted charge injection-based imprint model used for lead zircon ate-titanate thin film capacitors is adj usted and effectively fitted to the data of hafnium-zirconium oxide thin film capacitors. This confirms an interface-driven imprint mechanism for these devices and provides a method for benchmarking ten-year retention.

Details

Original languageEnglish
Title of host publication2024 IEEE International Reliability Physics Symposium, IRPS 2024 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages1-10
ISBN (electronic)979-8-3503-6976-2
Publication statusPublished - 2024
Peer-reviewedYes
Externally publishedYes

Publication series

SeriesIEEE International Reliability Physics Symposium Proceedings
ISSN1541-7026

Conference

Title2024 IEEE International Reliability Physics Symposium
Abbreviated titleIRPS 2024
Conference number62
Duration14 - 18 April 2024
Website
Degree of recognitionInternational event
LocationHilton DFW Lake
CityGrapevine
CountryUnited States of America

External IDs

ORCID /0000-0003-3814-0378/work/163295407

Keywords

ASJC Scopus subject areas

Keywords

  • Ferroelectric, Hafnium-Zirconium Oxide, HZO, Imprint, Memory, Model, Retention