Ferroelectric HfO2-based Capacitors for FeRAM: Reliability from Field Cycling Endurance to Retention (invited)

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Pramoda Vishnumurthy - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Ruben Alcala - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Thomas Mikolajick - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Luis Azevedo Antunes - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Alfred Kersch - , Hochschule für angewandte Wissenschaften München (Autor:in)

Abstract

When considering reliability concerns for introducing HfO2-based ferroelectric capacitors into production, polarization sensing issues caused by imprint have been shown to be the most critical. A common model for imprint in hafnium-zirconium oxide ferroelectric thin film capacitors has not yet been widely adopted. In this work, a widely accepted charge injection-based imprint model used for lead zircon ate-titanate thin film capacitors is adj usted and effectively fitted to the data of hafnium-zirconium oxide thin film capacitors. This confirms an interface-driven imprint mechanism for these devices and provides a method for benchmarking ten-year retention.

Details

OriginalspracheEnglisch
Titel2024 IEEE International Reliability Physics Symposium, IRPS 2024 - Proceedings
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
Seiten1-10
ISBN (elektronisch)979-8-3503-6976-2
PublikationsstatusVeröffentlicht - 2024
Peer-Review-StatusJa
Extern publiziertJa

Publikationsreihe

ReiheIEEE International Reliability Physics Symposium Proceedings
ISSN1541-7026

Konferenz

Titel2024 IEEE International Reliability Physics Symposium
KurztitelIRPS 2024
Veranstaltungsnummer62
Dauer14 - 18 April 2024
Webseite
BekanntheitsgradInternationale Veranstaltung
OrtHilton DFW Lake
StadtGrapevine
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0003-3814-0378/work/163295407

Schlagworte

ASJC Scopus Sachgebiete

Schlagwörter

  • Ferroelectric, Hafnium-Zirconium Oxide, HZO, Imprint, Memory, Model, Retention