Ferroelectric HfO2-based Capacitors for FeRAM: Reliability from Field Cycling Endurance to Retention (invited)
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
When considering reliability concerns for introducing HfO2-based ferroelectric capacitors into production, polarization sensing issues caused by imprint have been shown to be the most critical. A common model for imprint in hafnium-zirconium oxide ferroelectric thin film capacitors has not yet been widely adopted. In this work, a widely accepted charge injection-based imprint model used for lead zircon ate-titanate thin film capacitors is adj usted and effectively fitted to the data of hafnium-zirconium oxide thin film capacitors. This confirms an interface-driven imprint mechanism for these devices and provides a method for benchmarking ten-year retention.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2024 IEEE International Reliability Physics Symposium, IRPS 2024 - Proceedings |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers (IEEE) |
| Seiten | 1-10 |
| ISBN (elektronisch) | 979-8-3503-6976-2 |
| Publikationsstatus | Veröffentlicht - 2024 |
| Peer-Review-Status | Ja |
| Extern publiziert | Ja |
Publikationsreihe
| Reihe | IEEE International Reliability Physics Symposium Proceedings |
|---|---|
| ISSN | 1541-7026 |
Konferenz
| Titel | 2024 IEEE International Reliability Physics Symposium |
|---|---|
| Kurztitel | IRPS 2024 |
| Veranstaltungsnummer | 62 |
| Dauer | 14 - 18 April 2024 |
| Webseite | |
| Bekanntheitsgrad | Internationale Veranstaltung |
| Ort | Hilton DFW Lake |
| Stadt | Grapevine |
| Land | USA/Vereinigte Staaten |
Externe IDs
| ORCID | /0000-0003-3814-0378/work/163295407 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Ferroelectric, Hafnium-Zirconium Oxide, HZO, Imprint, Memory, Model, Retention