Ferroelectric hafnium oxide

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Contributors

  • Johannes Muller - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Patrick Polakowski - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Stefan Riedel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Stefan Mueller - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Ekaterina Yurchuk - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

In this paper the potential of hafnium oxide as a CMOS-compatible ferroelectric for future memory applications is assessed. The high coercive field strength of ferroelectric hafnium oxide is identified as a key parameter being crucial to device performance. It provides the unique thickness and lateral scaling potential of this novel ferroelectric, while at the same time compromises its endurance properties due to large switching fields. Considering the ambivalent nature of this parameter as well as the emerging trade-off between retention and endurance, voltage controlled operation modes and different device concepts for ferroelectric hafnium oxide are discussed.

Details

Original languageEnglish
Title of host publication2014 14th Annual Non-Volatile Memory Technology Symposium, NVMTS 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (electronic)978-1-4799-4202-2
ISBN (print)978-1-4799-4203-9
Publication statusPublished - 13 Mar 2015
Peer-reviewedYes

Publication series

SeriesAnnual Non-Volatile Memory Technology Symposium Proceedings (NVMTS)

Conference

Title2014 14th Annual Non-Volatile Memory Technology Symposium, NVMTS 2014
Duration27 - 29 October 2014
CityJeju Island
CountryKorea, Republic of

External IDs

ORCID /0000-0003-3814-0378/work/142256286