Ferroelectric hafnium oxide

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Johannes Muller - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Patrick Polakowski - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Stefan Riedel - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Stefan Mueller - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Ekaterina Yurchuk - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

In this paper the potential of hafnium oxide as a CMOS-compatible ferroelectric for future memory applications is assessed. The high coercive field strength of ferroelectric hafnium oxide is identified as a key parameter being crucial to device performance. It provides the unique thickness and lateral scaling potential of this novel ferroelectric, while at the same time compromises its endurance properties due to large switching fields. Considering the ambivalent nature of this parameter as well as the emerging trade-off between retention and endurance, voltage controlled operation modes and different device concepts for ferroelectric hafnium oxide are discussed.

Details

OriginalspracheEnglisch
Titel2014 14th Annual Non-Volatile Memory Technology Symposium, NVMTS 2014
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers Inc.
ISBN (elektronisch)978-1-4799-4202-2
ISBN (Print)978-1-4799-4203-9
PublikationsstatusVeröffentlicht - 13 März 2015
Peer-Review-StatusJa

Publikationsreihe

ReiheAnnual Non-Volatile Memory Technology Symposium Proceedings (NVMTS)

Konferenz

Titel2014 14th Annual Non-Volatile Memory Technology Symposium, NVMTS 2014
Dauer27 - 29 Oktober 2014
StadtJeju Island
LandSüdkorea

Externe IDs

ORCID /0000-0003-3814-0378/work/142256286

Schlagworte