Ferroelectric field-effect transistors based on HfO2: a review

Research output: Contribution to journalReview articleContributedpeer-review

Contributors

  • Halid Mulaosmanovic - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Evelyn T Breyer - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Stefan Dünkel - , Global Foundries Dresden (Author)
  • Sven Beyer - , Global Foundries Dresden (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

In this article, we review the recent progress of ferroelectric field-effect transistors (FeFETs) based on ferroelectric hafnium oxide (HfO2), ten years after the first report on such a device. With a focus on the use of FeFET for nonvolatile memory application, we discuss its basic operation principles, switching mechanisms, device types, material properties and array structures. Key device performance metrics such as cycling endurance, retention, memory window, multi-level operation and scaling capability are analyzed. We also briefly survey recent developments in alternative applications for FeFETs including neuromorphic and in-memory computing as well as radiofrequency devices.

Details

Original languageEnglish
Article number502002
JournalNanotechnology
Volume32
Issue number50
Publication statusPublished - 10 Dec 2021
Peer-reviewedYes

External IDs

Scopus 85116497856

Keywords