FeFET: A versatile CMOS compatible device with game-changing potential

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Sven Beyer - , Global Foundries, Inc. (Author)
  • Stefan Dünkel - , Global Foundries, Inc. (Author)
  • Martin Trentzsch - , Global Foundries, Inc. (Author)
  • Johannes Müller - , Global Foundries, Inc. (Author)
  • Andreas Hellmich - , Global Foundries, Inc. (Author)
  • Dirk Utess - , Global Foundries, Inc. (Author)
  • Jan Paul - , Global Foundries, Inc. (Author)
  • Dominik Kleimaier - , Global Foundries, Inc. (Author)
  • John Pellerin - , Global Foundries, Inc. (Author)
  • Halid Mulaosmanovic - , NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Evelyn T. Breyer - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Evelyn T. Breyer - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Stefan Müller - , Ferroelectric Memory GmbH (Author)
  • Johannes Ocker - , Ferroelectric Memory GmbH (Author)
  • Antoine Benoist - , Ferroelectric Memory GmbH (Author)
  • Haidi Zhou - , Ferroelectric Memory GmbH (Author)
  • Menno Mennenga - , Ferroelectric Memory GmbH (Author)
  • Martin Schuster - , Ferroelectric Memory GmbH (Author)
  • Fabio Tassan - , Ferroelectric Memory GmbH (Author)
  • Marko Noack - , Ferroelectric Memory GmbH (Author)
  • Ali Pourkeramati - , Ferroelectric Memory GmbH (Author)
  • Franz Müller - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Maximilian Lederer - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Tarek Ali - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Raik Hoffmann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Kämpfe - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)

Abstract

With the discovery of ferroelectricity in HfO2 based thin films and the co-integration of ferroelectric field effect transistors (FeFET) into standard high-k metal gate (HKMG) CMOS platforms, the FeFET has emerged from a theoretical dream to an applicable reality. This paper summarizes the status of GLOBALFOUNDRIES FeFET technology and some of its potential applications. We show excellent 0.12µm2 SRAM yields of our mature 28nm CMOS platform, with co-integrated FeFETs, exhibiting a solid memory window of 1.4V. In contrast to conventional embedded memory cells, the FeFET can be integrated like a regular 26Å EOT transistor, exhibiting two reversibly programmable VT states, while offering full design flexibility. We show state of the art across wafer VT variability of the programmed and erased states of the FeFETs and discuss its layout-dependence. Embedded size-competitive FeFETs already allow solid separation of the memory states, approaching a mature 6Sigma distribution. Reasonable endurance and stable data retention are demonstrated. Moreover, an outlook of this technology beyond the von Neumann computing will be discussed, considering some of the various applications of this new, versatile device.

Details

Original languageEnglish
Title of host publication2020 IEEE International Memory Workshop (IMW)
Place of PublicationDresden
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
ISBN (electronic)978-1-7281-6306-2
ISBN (print)978-1-7281-6307-9
Publication statusPublished - May 2020
Peer-reviewedYes

Publication series

SeriesIEEE International Memory Workshop (IMW)
ISSN2330-7978

Workshop

Title12th IEEE International Memory Workshop
Abbreviated titleIMW 2020
Conference number12
Duration17 - 20 May 2020
LocationOnline
CityDresden
CountryGermany

External IDs

ORCID /0000-0003-3814-0378/work/142256208