FeFET: A versatile CMOS compatible device with game-changing potential

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Sven Beyer - , Global Foundries, Inc. (Author)
  • Stefan Dünkel - , Global Foundries, Inc. (Author)
  • Martin Trentzsch - , Global Foundries, Inc. (Author)
  • Johannes Müller - , Global Foundries, Inc. (Author)
  • Andreas Hellmich - , Global Foundries, Inc. (Author)
  • Dirk Utess - , Global Foundries, Inc. (Author)
  • Jan Paul - , Global Foundries, Inc. (Author)
  • Dominik Kleimaier - , Global Foundries, Inc. (Author)
  • John Pellerin - , Global Foundries, Inc. (Author)
  • Halid Mulaosmanovic - , TUD Dresden University of Technology (Author)
  • Halid Mulaosmanovic - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Evelyn T. Breyer - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • Evelyn T. Breyer - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • Stefan Slesazeck - , TUD Dresden University of Technology (Author)
  • Stefan Müller - , TUD Dresden University of Technology (Author)
  • Johannes Ocker - , TUD Dresden University of Technology (Author)
  • Antoine Benoist - , TUD Dresden University of Technology (Author)
  • Haidi Zhou - , Chair of Nanoelectronics (Author)
  • Menno Mennenga - , TUD Dresden University of Technology (Author)
  • Martin Schuster - , Faculty of Electrical and Computer Engineering, TUD Dresden University of Technology (Author)
  • Fabio Tassan - , TUD Dresden University of Technology (Author)
  • Marko Noack - , Chair of Highly-Parallel VLSI Systems and Neuro-Microelectronics (Author)
  • Ali Pourkeramati - , TUD Dresden University of Technology (Author)
  • Franz Müller - , Ferroelectric Memory GmbH (Author)
  • Maximilian Lederer - , Chair of Experimental Physics / Photophysics, Ferroelectric Memory GmbH (Author)
  • Tarek Ali - , Ferroelectric Memory GmbH (Author)
  • Raik Hoffmann - , Ferroelectric Memory GmbH (Author)
  • Thomas Kämpfe - , Ferroelectric Memory GmbH, Fraunhofer Institute for Electronic Nano Systems (Author)
  • Konrad Seidel - , Ferroelectric Memory GmbH (Author)

Abstract

With the discovery of ferroelectricity in HfO2 based thin films and the co-integration of ferroelectric field effect transistors (FeFET) into standard high-k metal gate (HKMG) CMOS platforms, the FeFET has emerged from a theoretical dream to an applicable reality. This paper summarizes the status of GLOBALFOUNDRIES FeFET technology and some of its potential applications. We show excellent 0.12µm2 SRAM yields of our mature 28nm CMOS platform, with co-integrated FeFETs, exhibiting a solid memory window of 1.4V. In contrast to conventional embedded memory cells, the FeFET can be integrated like a regular 26Å EOT transistor, exhibiting two reversibly programmable VT states, while offering full design flexibility. We show state of the art across wafer VT variability of the programmed and erased states of the FeFETs and discuss its layout-dependence. Embedded size-competitive FeFETs already allow solid separation of the memory states, approaching a mature 6Sigma distribution. Reasonable endurance and stable data retention are demonstrated. Moreover, an outlook of this technology beyond the von Neumann computing will be discussed, considering some of the various applications of this new, versatile device.

Details

Original languageEnglish
Title of host publication2020 IEEE International Memory Workshop (IMW)
Place of PublicationDresden
PublisherIEEE Xplore
ISBN (electronic)978-1-7281-6306-2
ISBN (print)978-1-7281-6307-9
Publication statusPublished - May 2020
Peer-reviewedYes

Publication series

SeriesIEEE International Memory Workshop (IMW)
ISSN2330-7978

Conference

Title2020 IEEE International Memory Workshop, IMW 2020
Duration17 - 20 May 2020
CityDresden
CountryGermany

External IDs

ORCID /0000-0003-3814-0378/work/142256208