FeFET: A versatile CMOS compatible device with game-changing potential

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Sven Beyer - , Global Foundries, Inc. (Autor:in)
  • Stefan Dünkel - , Global Foundries, Inc. (Autor:in)
  • Martin Trentzsch - , Global Foundries, Inc. (Autor:in)
  • Johannes Müller - , Global Foundries, Inc. (Autor:in)
  • Andreas Hellmich - , Global Foundries, Inc. (Autor:in)
  • Dirk Utess - , Global Foundries, Inc. (Autor:in)
  • Jan Paul - , Global Foundries, Inc. (Autor:in)
  • Dominik Kleimaier - , Global Foundries, Inc. (Autor:in)
  • John Pellerin - , Global Foundries, Inc. (Autor:in)
  • Halid Mulaosmanovic - , NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • Evelyn T. Breyer - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Evelyn T. Breyer - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • Stefan Müller - , Ferroelectric Memory Company (Autor:in)
  • Johannes Ocker - , Ferroelectric Memory Company (Autor:in)
  • Antoine Benoist - , Ferroelectric Memory Company (Autor:in)
  • Haidi Zhou - , Ferroelectric Memory Company (Autor:in)
  • Menno Mennenga - , Ferroelectric Memory Company (Autor:in)
  • Martin Schuster - , Ferroelectric Memory Company (Autor:in)
  • Fabio Tassan - , Ferroelectric Memory Company (Autor:in)
  • Marko Noack - , Ferroelectric Memory Company (Autor:in)
  • Ali Pourkeramati - , Ferroelectric Memory Company (Autor:in)
  • Franz Müller - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Maximilian Lederer - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Tarek Ali - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Raik Hoffmann - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Thomas Kämpfe - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Konrad Seidel - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)

Abstract

With the discovery of ferroelectricity in HfO2 based thin films and the co-integration of ferroelectric field effect transistors (FeFET) into standard high-k metal gate (HKMG) CMOS platforms, the FeFET has emerged from a theoretical dream to an applicable reality. This paper summarizes the status of GLOBALFOUNDRIES FeFET technology and some of its potential applications. We show excellent 0.12µm2 SRAM yields of our mature 28nm CMOS platform, with co-integrated FeFETs, exhibiting a solid memory window of 1.4V. In contrast to conventional embedded memory cells, the FeFET can be integrated like a regular 26Å EOT transistor, exhibiting two reversibly programmable VT states, while offering full design flexibility. We show state of the art across wafer VT variability of the programmed and erased states of the FeFETs and discuss its layout-dependence. Embedded size-competitive FeFETs already allow solid separation of the memory states, approaching a mature 6Sigma distribution. Reasonable endurance and stable data retention are demonstrated. Moreover, an outlook of this technology beyond the von Neumann computing will be discussed, considering some of the various applications of this new, versatile device.

Details

OriginalspracheEnglisch
Titel2020 IEEE International Memory Workshop (IMW)
ErscheinungsortDresden
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
ISBN (elektronisch)978-1-7281-6306-2
ISBN (Print)978-1-7281-6307-9
PublikationsstatusVeröffentlicht - Mai 2020
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE International Memory Workshop (IMW)
ISSN2330-7978

Workshop

Titel12th IEEE International Memory Workshop
KurztitelIMW 2020
Veranstaltungsnummer12
Dauer17 - 20 Mai 2020
OrtOnline
StadtDresden
LandDeutschland

Externe IDs

ORCID /0000-0003-3814-0378/work/142256208