Endurance and targeted programming behavior of HfO2-FeFETs

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Haidi Zhou - , Ferroelectric Memory GmbH (Author)
  • Johannes Ocker Menno Mennenga - , Ferroelectric Memory GmbH (Author)
  • Marko Noack Stefan Müller - , Ferroelectric Memory GmbH (Author)
  • Marko Noack Stefan Müller - , Global Foundries, Inc. (Author)
  • Martin Trentzsch - , Ferroelectric Memory GmbH (Author)
  • Martin Trentzsch - , Global Foundries, Inc. (Author)
  • Stefan Dünkel Sven Beyer - , Global Foundries, Inc. (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

In this paper, recent advances on the development of Hafnium oxide (HfO2)-based ferroelectric field-effect transistors (FeFETs) are shown with respect to its memory window, trapping behavior and endurance characteristics. Although this novel ferroelectric memory cell shows superior characteristics such as device scalability, CMOS compatibility, fast access time and low power operation, the challenges for HfO2-based FeFET device lie with device variability and endurance. To investigate endurance failure in relation to charge trapping, different time delays were introduced to allow for detrapping of charges leading to improved endurance behavior. Besides the continuous improvements in process technology which minimize trap densities, we here demonstrate a mitigation of device variability, using a targeted programming scheme, with which a significantly lower device variability is achieved.

Details

Original languageEnglish
Title of host publication2020 IEEE International Memory Workshop (IMW)
Place of PublicationDresden
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
ISBN (electronic)978-1-7281-6306-2
ISBN (print)978-1-7281-6307-9
Publication statusPublished - May 2020
Peer-reviewedYes

Publication series

SeriesIEEE International Memory Workshop (IMW)
ISSN2330-7978

Workshop

Title12th IEEE International Memory Workshop
Abbreviated titleIMW 2020
Conference number12
Duration17 - 20 May 2020
LocationOnline
CityDresden
CountryGermany

External IDs

ORCID /0000-0003-3814-0378/work/142256264

Keywords

Keywords

  • Charge trapping, Device variability, Endurance failure, Hfo2-based fefet, Targeted programming