Endurance and targeted programming behavior of HfO2-FeFETs

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Haidi Zhou - , Ferroelectric Memory Company (Autor:in)
  • Johannes Ocker Menno Mennenga - , Ferroelectric Memory Company (Autor:in)
  • Marko Noack Stefan Müller - , Ferroelectric Memory Company (Autor:in)
  • Marko Noack Stefan Müller - , Global Foundries, Inc. (Autor:in)
  • Martin Trentzsch - , Ferroelectric Memory Company (Autor:in)
  • Martin Trentzsch - , Global Foundries, Inc. (Autor:in)
  • Stefan Dünkel Sven Beyer - , Global Foundries, Inc. (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

In this paper, recent advances on the development of Hafnium oxide (HfO2)-based ferroelectric field-effect transistors (FeFETs) are shown with respect to its memory window, trapping behavior and endurance characteristics. Although this novel ferroelectric memory cell shows superior characteristics such as device scalability, CMOS compatibility, fast access time and low power operation, the challenges for HfO2-based FeFET device lie with device variability and endurance. To investigate endurance failure in relation to charge trapping, different time delays were introduced to allow for detrapping of charges leading to improved endurance behavior. Besides the continuous improvements in process technology which minimize trap densities, we here demonstrate a mitigation of device variability, using a targeted programming scheme, with which a significantly lower device variability is achieved.

Details

OriginalspracheEnglisch
Titel2020 IEEE International Memory Workshop (IMW)
ErscheinungsortDresden
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
ISBN (elektronisch)978-1-7281-6306-2
ISBN (Print)978-1-7281-6307-9
PublikationsstatusVeröffentlicht - Mai 2020
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE International Memory Workshop (IMW)
ISSN2330-7978

Workshop

Titel12th IEEE International Memory Workshop
KurztitelIMW 2020
Veranstaltungsnummer12
Dauer17 - 20 Mai 2020
OrtOnline
StadtDresden
LandDeutschland

Externe IDs

ORCID /0000-0003-3814-0378/work/142256264

Schlagworte

Schlagwörter

  • Charge trapping, Device variability, Endurance failure, Hfo2-based fefet, Targeted programming