Electro-optical co-integration platform for high-density hybrid systems - SILHOUETTE

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Contributors

Abstract

This paper introduces so called SILHOUETTE platform for electro-optical (E/O) co-integration for high-density hybrid systems. Need for parallel, flexible and scalable system integration approaches demanded by integrated photonics is explained. Platform concept based on co-design of SiN photonic processing unit (PPU), application specific integrated circuit (ASIC) and Si-interposer with optical function introduced by polymeric back end of line (BEOL) is shown. Design and functionality of individual components as well as their co-design is detailed. Processing of Si-interposer with electrical redistribution layer (RDL), pads as well as polymeric waveguides (WGs) and µ-mirrors via hybrid lithography is shown. PPU fabrication on 300 mm wafer with deposition and structuring of SiN for WGs, SiO2 cladding and TiN for heaters is shown. Cu-RDL, pads and solder bumps are deposited for reflow assembly of PPU. Finally work is concluded and an outlook to future goals of consortium is provided.

Details

Original languageEnglish
Title of host publicationMikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings
PublisherVDE Verlag, Berlin [u. a.]
Pages774-781
Number of pages8
ISBN (electronic)9783800762040
ISBN (print)978-3-8007-6203-3
Publication statusPublished - 25 Oct 2023
Peer-reviewedYes

Conference

TitleMicroSystems Technology Congress 2023
SubtitleMicroelectronics, Microsystems Technology and their Applications - Sustainability and Technology Sovereignty
Duration23 - 25 October 2023
LocationMaritim Hotel & Internationales Congress Center Dresden
CityDresden
CountryGermany

External IDs

Scopus 85196910740
ORCID /0000-0002-0757-3325/work/165062963

Keywords

Keywords

  • co-design, hybrid interposer, micro-optics, optical interconnects, optical packaging, ORMOCER, single mode, true random number generator, waveguides