Electro-optical co-integration platform for high-density hybrid systems - SILHOUETTE
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
This paper introduces so called SILHOUETTE platform for electro-optical (E/O) co-integration for high-density hybrid systems. Need for parallel, flexible and scalable system integration approaches demanded by integrated photonics is explained. Platform concept based on co-design of SiN photonic processing unit (PPU), application specific integrated circuit (ASIC) and Si-interposer with optical function introduced by polymeric back end of line (BEOL) is shown. Design and functionality of individual components as well as their co-design is detailed. Processing of Si-interposer with electrical redistribution layer (RDL), pads as well as polymeric waveguides (WGs) and µ-mirrors via hybrid lithography is shown. PPU fabrication on 300 mm wafer with deposition and structuring of SiN for WGs, SiO2 cladding and TiN for heaters is shown. Cu-RDL, pads and solder bumps are deposited for reflow assembly of PPU. Finally work is concluded and an outlook to future goals of consortium is provided.
Details
Originalsprache | Englisch |
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Titel | MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings |
Herausgeber (Verlag) | VDE Verlag, Berlin [u. a.] |
Seiten | 774-781 |
Seitenumfang | 8 |
ISBN (elektronisch) | 9783800762040 |
ISBN (Print) | 978-3-8007-6203-3 |
Publikationsstatus | Veröffentlicht - 25 Okt. 2023 |
Peer-Review-Status | Ja |
Konferenz
Titel | MikroSystemTechnik Kongress 2023 |
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Untertitel | Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat |
Dauer | 23 - 25 Oktober 2023 |
Ort | Maritim Hotel & Internationales Congress Center Dresden |
Stadt | Dresden |
Land | Deutschland |
Externe IDs
Scopus | 85196910740 |
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ORCID | /0000-0002-0757-3325/work/165062963 |
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- co-design, hybrid interposer, micro-optics, optical interconnects, optical packaging, ORMOCER, single mode, true random number generator, waveguides