Electro-optical co-integration platform for high-density hybrid systems - SILHOUETTE

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

This paper introduces so called SILHOUETTE platform for electro-optical (E/O) co-integration for high-density hybrid systems. Need for parallel, flexible and scalable system integration approaches demanded by integrated photonics is explained. Platform concept based on co-design of SiN photonic processing unit (PPU), application specific integrated circuit (ASIC) and Si-interposer with optical function introduced by polymeric back end of line (BEOL) is shown. Design and functionality of individual components as well as their co-design is detailed. Processing of Si-interposer with electrical redistribution layer (RDL), pads as well as polymeric waveguides (WGs) and µ-mirrors via hybrid lithography is shown. PPU fabrication on 300 mm wafer with deposition and structuring of SiN for WGs, SiO2 cladding and TiN for heaters is shown. Cu-RDL, pads and solder bumps are deposited for reflow assembly of PPU. Finally work is concluded and an outlook to future goals of consortium is provided.

Details

OriginalspracheEnglisch
TitelMikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings
Herausgeber (Verlag)VDE Verlag, Berlin [u. a.]
Seiten774-781
Seitenumfang8
ISBN (elektronisch)9783800762040
ISBN (Print)978-3-8007-6203-3
PublikationsstatusVeröffentlicht - 25 Okt. 2023
Peer-Review-StatusJa

Konferenz

TitelMikroSystemTechnik Kongress 2023
UntertitelMikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat
Dauer23 - 25 Oktober 2023
OrtMaritim Hotel & Internationales Congress Center Dresden
StadtDresden
LandDeutschland

Externe IDs

Scopus 85196910740
ORCID /0000-0002-0757-3325/work/165062963

Schlagworte

Schlagwörter

  • co-design, hybrid interposer, micro-optics, optical interconnects, optical packaging, ORMOCER, single mode, true random number generator, waveguides