Discovery of Nanoscale Electric Field-Induced Phase Transitions in ZrO2

Research output: Contribution to journalResearch articleInvitedpeer-review

Contributors

  • Patrick D. Lomenzo - (Author)
  • Liam Collins - , Oak Ridge National Laboratory (Author)
  • Richard Ganser - , Munich University of Applied Sciences (Author)
  • Bohan Xu - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Roberto Guido - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Alexei Gruverman - , University of Nebraska-Lincoln (Author)
  • Alfred Kersch - , Munich University of Applied Sciences (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

The emergence of ferroelectric and antiferroelectric properties in the semiconductor industry's most prominent high-k dielectrics, HfO2 and ZrO2, is leading to technology developments unanticipated a decade ago. Yet the failure to clearly distinguish ferroelectric from antiferroelectric behavior is impeding progress. Band-excitation piezoresponse force microscopy and molecular dynamics are used to elucidate the nanoscale electric field-induced phase transitions present in ZrO2-based antiferroelectrics. Antiferroelectric ZrO2 is clearly distinguished from a closely resembling pinched La-doped HfO2 ferroelectric. Crystalline grains in the range of 3 – 20 nm are imaged independently undergoing reversible electric field induced phase transitions. The electrically accessible nanoscale phase transitions discovered in this study open up an unprecedented paradigm for the development of new nanoelectronic devices.

Details

Original languageEnglish
Article number2303636
Number of pages9
JournalAdvanced functional materials
Volume33
Issue number41
Publication statusPublished - 8 Jun 2023
Peer-reviewedYes

External IDs

WOS 001003005400001
ORCID /0000-0003-3814-0378/work/142256360

Keywords

DFG Classification of Subject Areas according to Review Boards

Subject groups, research areas, subject areas according to Destatis

Keywords

  • antiferroelectrics, phase transitions, piezoelectrics, piezoresponse force microscopy, zirconia, Zirconia, Piezoelectrics, Piezoresponse force microscopy, Phase transitions, Antiferroelectrics