Discovery of Nanoscale Electric Field-Induced Phase Transitions in ZrO2

Publikation: Beitrag in FachzeitschriftForschungsartikelEingeladenBegutachtung

Beitragende

  • Patrick D. Lomenzo - (Autor:in)
  • Liam Collins - , Oak Ridge National Laboratory (Autor:in)
  • Richard Ganser - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Bohan Xu - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Roberto Guido - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Alexei Gruverman - , University of Nebraska-Lincoln (Autor:in)
  • Alfred Kersch - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

The emergence of ferroelectric and antiferroelectric properties in the semiconductor industry's most prominent high-k dielectrics, HfO2 and ZrO2, is leading to technology developments unanticipated a decade ago. Yet the failure to clearly distinguish ferroelectric from antiferroelectric behavior is impeding progress. Band-excitation piezoresponse force microscopy and molecular dynamics are used to elucidate the nanoscale electric field-induced phase transitions present in ZrO2-based antiferroelectrics. Antiferroelectric ZrO2 is clearly distinguished from a closely resembling pinched La-doped HfO2 ferroelectric. Crystalline grains in the range of 3 – 20 nm are imaged independently undergoing reversible electric field induced phase transitions. The electrically accessible nanoscale phase transitions discovered in this study open up an unprecedented paradigm for the development of new nanoelectronic devices.

Details

OriginalspracheEnglisch
Aufsatznummer2303636
Seitenumfang9
FachzeitschriftAdvanced functional materials
Jahrgang33
Ausgabenummer41
PublikationsstatusVeröffentlicht - 8 Juni 2023
Peer-Review-StatusJa

Externe IDs

WOS 001003005400001
ORCID /0000-0003-3814-0378/work/142256360

Schlagworte

Fächergruppen, Lehr- und Forschungsbereiche, Fachgebiete nach Destatis

Schlagwörter

  • antiferroelectrics, phase transitions, piezoelectrics, piezoresponse force microscopy, zirconia, Zirconia, Piezoelectrics, Piezoresponse force microscopy, Phase transitions, Antiferroelectrics