Der Einfluß statistischer Dotierungsschwankungen auf die minimale Kanallänge von Kurzkanal-MOS-Transistoren

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • T. Mikolajick - , Fraunhofer Institute for Integrated Circuits (Author)
  • H. Ryssel - , Fraunhofer Institute for Integrated Circuits (Author)

Details

Original languageGerman
Pages (from-to)183-188
Number of pages6
JournalITG-Fachbericht
Issue number138
Publication statusPublished - 1996
Peer-reviewedYes
Externally publishedYes

External IDs

ORCID /0000-0003-3814-0378/work/155840909

Keywords

ASJC Scopus subject areas