Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Recently, a novel, one-transistor one-capacitor (1T1C) type, ferroelectric random-access memory (FeRAM) array was developed, and its operation was experimentally demonstrated. This array was based on ferroelectric Hf0.5Zr0.5O2 (HZO), with a capacitor under bitline structure, and was compatible with system-on-chip. In this work, bitline voltage difference distributions were examined via cycling tests and observed to not deteriorate during fatigue and recovery stress, indicating uniform charge trapping and domain de-pinning within the ferroelectric domains in the test chip.
Details
| Original language | English |
|---|---|
| Title of host publication | 6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022 |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Pages | 64-66 |
| Number of pages | 3 |
| ISBN (electronic) | 9781665421775 |
| Publication status | Published - 2022 |
| Peer-reviewed | Yes |
Publication series
| Series | IEEE Electron Devices Technology and Manufacturing Conference (EDTM) |
|---|
Conference
| Title | 6th IEEE Electron Devices Technology and Manufacturing Conference |
|---|---|
| Abbreviated title | EDTM 2022 |
| Conference number | 6 |
| Duration | 6 - 9 March 2022 |
| Website | |
| Location | Online |
| City | Oita |
| Country | Japan |
External IDs
| ORCID | /0000-0003-3814-0378/work/142256157 |
|---|
Keywords
ASJC Scopus subject areas
Keywords
- Fatigue, recovery and FeRAM array