Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Jun Okuno - , Sony Group Corporation (Author)
  • Tsubasa Yonai - , Sony Group Corporation (Author)
  • Takafumi Kunihiro - , Sony Group Corporation (Author)
  • Kenta Konishi - , Sony Group Corporation (Author)
  • Monica Materano - , Chair of Nanoelectronics (Author)
  • Tarek Ali - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Maximilian Lederer - , Chair of Experimental Physics / Photophysics, Institute of Applied Physics, Fraunhofer Institute for Photonic Microsystems (Author)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics (Author)
  • Uwe Schroeder - , TUD Dresden University of Technology (Author)
  • Masanori Tsukamoto - , Sony Group Corporation (Author)
  • Taku Umebayashi - , Sony Group Corporation (Author)

Abstract

Recently, a novel, one-transistor one-capacitor (1T1C) type, ferroelectric random-access memory (FeRAM) array was developed, and its operation was experimentally demonstrated. This array was based on ferroelectric Hf0.5Zr0.5O2 (HZO), with a capacitor under bitline structure, and was compatible with system-on-chip. In this work, bitline voltage difference distributions were examined via cycling tests and observed to not deteriorate during fatigue and recovery stress, indicating uniform charge trapping and domain de-pinning within the ferroelectric domains in the test chip.

Details

Original languageEnglish
Title of host publication6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages64-66
Number of pages3
ISBN (electronic)9781665421775
Publication statusPublished - 2022
Peer-reviewedYes

Publication series

SeriesIEEE Electron Devices Technology and Manufacturing Conference (EDTM)

Conference

Title6th IEEE Electron Devices Technology and Manufacturing Conference
Abbreviated titleEDTM 2022
Conference number6
Duration6 - 9 March 2022
Website
LocationOnline
CityOita
CountryJapan

External IDs

ORCID /0000-0003-3814-0378/work/142256157