Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Contributors

  • Jun Okuno - , Sony Group Corporation (Author)
  • Tsubasa Yonai - , Sony Group Corporation (Author)
  • Takafumi Kunihiro - , Sony Group Corporation (Author)
  • Kenta Konishi - , Sony Group Corporation (Author)
  • Monica Materano - , Chair of Nanoelectronics (Author)
  • Tarek Ali - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Maximilian Lederer - , Chair of Experimental Physics / Photophysics, Institute of Applied Physics, Fraunhofer Institute for Photonic Microsystems (Author)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics (Author)
  • Uwe Schroeder - , TUD Dresden University of Technology (Author)
  • Masanori Tsukamoto - , Sony Group Corporation (Author)
  • Taku Umebayashi - , Sony Group Corporation (Author)

Abstract

Recently, a novel, one-transistor one-capacitor (1T1C) type, ferroelectric random-access memory (FeRAM) array was developed, and its operation was experimentally demonstrated. This array was based on ferroelectric Hf0.5Zr0.5O2 (HZO), with a capacitor under bitline structure, and was compatible with system-on-chip. In this work, bitline voltage difference distributions were examined via cycling tests and observed to not deteriorate during fatigue and recovery stress, indicating uniform charge trapping and domain de-pinning within the ferroelectric domains in the test chip.

Details

Original languageEnglish
Title of host publication6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022
PublisherIEEE, New York [u. a.]
Pages64-66
Number of pages3
ISBN (electronic)9781665421775
Publication statusPublished - 2022
Peer-reviewedYes

Publication series

SeriesIEEE Electron Devices Technology and Manufacturing Conference (EDTM)

Conference

Title6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022
Duration6 - 9 March 2022
CityVirtual, Online
CountryJapan

External IDs

ORCID /0000-0003-3814-0378/work/142256157