Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Recently, a novel, one-transistor one-capacitor (1T1C) type, ferroelectric random-access memory (FeRAM) array was developed, and its operation was experimentally demonstrated. This array was based on ferroelectric Hf0.5Zr0.5O2 (HZO), with a capacitor under bitline structure, and was compatible with system-on-chip. In this work, bitline voltage difference distributions were examined via cycling tests and observed to not deteriorate during fatigue and recovery stress, indicating uniform charge trapping and domain de-pinning within the ferroelectric domains in the test chip.
Details
Original language | English |
---|---|
Title of host publication | 6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022 |
Publisher | IEEE, New York [u. a.] |
Pages | 64-66 |
Number of pages | 3 |
ISBN (electronic) | 9781665421775 |
Publication status | Published - 2022 |
Peer-reviewed | Yes |
Publication series
Series | IEEE Electron Devices Technology and Manufacturing Conference (EDTM) |
---|
Conference
Title | 6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022 |
---|---|
Duration | 6 - 9 March 2022 |
City | Virtual, Online |
Country | Japan |
External IDs
ORCID | /0000-0003-3814-0378/work/142256157 |
---|
Keywords
ASJC Scopus subject areas
Keywords
- Fatigue, recovery and FeRAM array