Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Recently, a novel, one-transistor one-capacitor (1T1C) type, ferroelectric random-access memory (FeRAM) array was developed, and its operation was experimentally demonstrated. This array was based on ferroelectric Hf0.5Zr0.5O2 (HZO), with a capacitor under bitline structure, and was compatible with system-on-chip. In this work, bitline voltage difference distributions were examined via cycling tests and observed to not deteriorate during fatigue and recovery stress, indicating uniform charge trapping and domain de-pinning within the ferroelectric domains in the test chip.
Details
Originalsprache | Englisch |
---|---|
Titel | 6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022 |
Herausgeber (Verlag) | IEEE, New York [u. a.] |
Seiten | 64-66 |
Seitenumfang | 3 |
ISBN (elektronisch) | 9781665421775 |
Publikationsstatus | Veröffentlicht - 2022 |
Peer-Review-Status | Ja |
Publikationsreihe
Reihe | IEEE Electron Devices Technology and Manufacturing Conference (EDTM) |
---|
Konferenz
Titel | 6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022 |
---|---|
Dauer | 6 - 9 März 2022 |
Stadt | Virtual, Online |
Land | Japan |
Externe IDs
ORCID | /0000-0003-3814-0378/work/142256157 |
---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Fatigue, recovery and FeRAM array