Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Jun Okuno - , Sony Group Corporation (Autor:in)
  • Tsubasa Yonai - , Sony Group Corporation (Autor:in)
  • Takafumi Kunihiro - , Sony Group Corporation (Autor:in)
  • Kenta Konishi - , Sony Group Corporation (Autor:in)
  • Monica Materano - , Professur für Nanoelektronik (Autor:in)
  • Tarek Ali - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Maximilian Lederer - , Professur für Experimentalphysik/Photophysik, Institut für Angewandte Physik (IAP), Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Konrad Seidel - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik (Autor:in)
  • Uwe Schroeder - , Technische Universität Dresden (Autor:in)
  • Masanori Tsukamoto - , Sony Group Corporation (Autor:in)
  • Taku Umebayashi - , Sony Group Corporation (Autor:in)

Abstract

Recently, a novel, one-transistor one-capacitor (1T1C) type, ferroelectric random-access memory (FeRAM) array was developed, and its operation was experimentally demonstrated. This array was based on ferroelectric Hf0.5Zr0.5O2 (HZO), with a capacitor under bitline structure, and was compatible with system-on-chip. In this work, bitline voltage difference distributions were examined via cycling tests and observed to not deteriorate during fatigue and recovery stress, indicating uniform charge trapping and domain de-pinning within the ferroelectric domains in the test chip.

Details

OriginalspracheEnglisch
Titel6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022
Herausgeber (Verlag)IEEE, New York [u. a.]
Seiten64-66
Seitenumfang3
ISBN (elektronisch)9781665421775
PublikationsstatusVeröffentlicht - 2022
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE Electron Devices Technology and Manufacturing Conference (EDTM)

Konferenz

Titel6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022
Dauer6 - 9 März 2022
StadtVirtual, Online
LandJapan

Externe IDs

ORCID /0000-0003-3814-0378/work/142256157